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Washington think tank counts 343 immersion DUV machines in Chinese-owned fabs

Chinese-owned chip plants held 343 immersion DUV machines by early this year, about 270 of them ASML NXT:1980i units, a Washington think tank says. Its authors want all new DUV shipments stopped, and a bipartisan bill in Congress would require the Netherlands and Japan to do exactly that.

The Investor · Invest desk

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What happened

  • China spent more than $13 billion buying 90 more NXT:1980i scanners in 2024 and another 89 in 2025, according to the report.
  • The Netherlands blocked ASML's EUV exports to China in 2019 but approves NXT:1980i sales case by case, a regime CTS says let shipments reach many Chinese sites.
  • Chinese fabs ran the NXT:1980i with multi-patterning, drawing circuits in overlapping layers, to mass-produce Huawei's Ascend AI accelerators and advanced memory.

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Why it matters

  • cost A full DUV cutoff would take away more than $6.5 billion a year of ASML sales if China's imports would otherwise hold at 90 NXT:1980i units, and ASML's shareholders absorb that loss.
  • constraint The 2027 ban the authors propose still leaves China's projected 2035 output at about a third of the no-ban path, capping what any new US law can achieve against tools already shipped.
  • decision The MATCH Act would give the Netherlands and Japan 150 days to adopt US limits on DUV tools, taking the NXT:1980i licensing choice out of Dutch hands.
  • exposure ASML's China immersion orders face a state-backed Chinese DUV producer as well as Congress, so they can shrink even if Dutch licences keep flowing.

Divide the spending by the machines and each NXT:1980i cost China more than $72 million [1]. That holds if the $13 billion covers both the 90 units of 2024 and the 89 of 2025, which is how the figures are phrased [4]. Those 179 purchases are about two-thirds of the roughly 270 NXT:1980i scanners in the CTS count [2][3].

The report's headline projection is up to 434 million chips a year by 2035, each equivalent to an Nvidia H100, on the assumption that China keeps importing 90 NXT:1980i machines a year [10]. That matches the 2024 pace, or rather the 2024 pace to the unit and the 2025 pace less one [4]. At the implied price it is more than $6.5 billion of annual sales for ASML, which holds a near-monopoly in advanced lithography [3][5]. The published accounts of the report do not compare the purchases with ASML's total revenue or its China share [2].

Washington cares about an older tool because immersion DUV, though behind EUV, can make 7-nanometer logic and high-end memory [7]. The co-authors are Nicholas Brown, a former Commerce Department export control officer, and Saif Khan, a former White House technology policy adviser, and they argue that a full DUV blockade is urgently needed [12]. Their own model sets limits on what that achieves. Stopping new imports from 2027 cuts the 2035 projection to about 153 million chips, a reduction of about 281 million, or roughly 65% [11][4]. The remaining 153 million is what CTS expects China to make even under the policy it is asking for [11].

For ASML's China immersion revenue, the base case is that Dutch case-by-case licensing continues and the CTS assumption of 90 machines a year holds [6][10]. Congress offers an alternative in the MATCH Act, a bill that would pull the Netherlands and Japan into US rules within 150 days [14]. Beijing offers its own: The Information reported in July that a Chinese company had begun producing DUV systems with government support [13]. That news came after a December report of a Chinese EUV prototype, and it sent global chipmaker shares down as investors bet on ASML's monopoly cracking [15].

I think the second and third paths end in the same place for ASML's China immersion orders, and Beijing's spending suggests it agrees. China is not waiting for a domestic tool. It bought 179 foreign scanners in two years while a Chinese maker started DUV production with state help [4][13]. Seoul Economic Daily attributes that push to build locally to the effort in Washington to tighten lithography controls [16]. The counter-case rests on the Dutch record. The Netherlands took back licensing control of older models after pushback at home, and the MATCH Act has only been introduced [6][14].

The view is wrong if Dutch licences keep clearing at the 2024-25 rate, the bill stalls and the Chinese DUV maker ships nothing in volume through 2027 [4][13][14]. In that case ASML keeps collecting more than $6.5 billion a year from one model in one country, at the report's own prices [3].

What to watch

  • Any committee or floor vote on the MATCH Act, and whether the Dutch or Japanese governments say they would comply within its 150-day window.
  • ASML's China immersion orders measured against the 89 to 90 NXT:1980i units a year China took in 2024 and 2025.
  • Evidence that the Chinese DUV producer The Information described in July is shipping tools in volume to Chinese fabs.
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